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 Main exhibits
A wide cross-section of applied technology, products, and production equipment and technology related to Micromachine/MEMS will be on display. |
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| MEMS process equipment |
Material |
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Thin film formation (vapor deposition, sputtering, CVD, plating) system |
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Lithography, exposure system |
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Resist processing system |
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Etcher |
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Bonder |
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High-precision grinding/lapping machine, chemical mechanical polishing machine |
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Dicer |
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Laser beam processing system |
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Packaging machine |
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Microforming (injection, hot embossing) system |
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Other manufacturing equipment |
| Others |
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Piezoelectric thin film (ZnO, AIN, PZT) |
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Ferroelectric substance |
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Magnetic material |
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Silicon/SOI wafer |
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Glass/quartz wafer |
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SiC wafer |
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Sapphire |
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Resist material |
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Polymer |
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Adhesive material |
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Protection material |
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Nanotube |
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Ceramic/LTCC substrate |
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Via hole wafer, TSV |
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Package |
| Others |
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| Nanoimprint technology |
Modeling software |
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Micro & nano mold |
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Nanoimprint manufacturing equipment |
| Others |
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Design tool |
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Simulation software |
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Analysis software for CAD & CAE |
| Others |
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| Nanomachining, microfabrication techniques |
Biotechnology, medical application system |
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Ultra-precision nanomachining techniques |
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Etching |
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Bonding |
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Drilling |
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Surface treatment |
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High-precision grinding/lapping , chemical mechanical polishing |
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Dicing |
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Laser beam processing |
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Ion beam processing |
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Micro-electro-discharge machining |
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Ultrasonic wave machining |
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Packaging |
| Others |
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Capsule endoscope |
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DDS |
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Nanocapsule |
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Microreactor |
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Chemical analysis and measurement system |
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Medical equipment |
| Others |
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| Measurement, inspection, and reliability testing machine |
MEMS device |
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Mask/reticle defect inspector, package inspector |
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Surface profiler, roughness meter, film thickness measurement system |
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Optical microscope |
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Scanning electron microscope / X-ray spectrometry |
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Laser microscope |
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Probe microscope |
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Auger electron spectroscope |
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X-ray photoelectron spectroscope |
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Reliability testing machine (thermal cycle testing machine, PCT, HAST, etc.) |
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Prober |
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Leak detector |
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Laser doppler vibrometer |
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Liquid/gas analyzing system |
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Other analyzing system |
| Others |
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Optical MEMS (mirror, switch, scanner etc.) |
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RF-MEMS (switch, oscillator, filter etc.) |
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MEMS physical sensor (acceleration sensor, yaw rate sensor, pressure sensor, gas sensor, temperature sensor, etc.) |
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Micro fluidics (microchannel, micromixer, etc.) |
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MEMS actuator (valve, pump, etc.) |
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Microphone |
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Power MEMS (fuel cell, micro-power generator energy harvest etc.) |
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Bio/chemical MEMS (DNA/RNA tip, etc.) |
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Highly integrated and complex MEMS (CMOS/MEMS, LSI/MEMS integration) |
| Others |
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| MEMS foundry service |
MEMS application system |
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Design simulation |
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Prototyping |
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Product development |
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Mass production |
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Thin film formation |
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Etching |
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High-precision grinding/lapping, chemical mechanical polishing, dicing |
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Laser beam processing |
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Other foundry service |
| Others |
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Information processing system (mobile, display, printer, etc.) |
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Microrobot/micromachine |
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Microfactory |
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Sensor network |
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ITS(intelligent transport system) |
| Others |
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![Exhibition Micromachine/MEMS July 29-31, 2009 [Wed. to Fri] Tokyo](img/common/page_title_e.jpg)