Exhibition Micromachine/MEMS July 29-31, 2009 [Wed. to Fri] Tokyo messe frankfurt

Visitor Info

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Exhibition Micromachine/MEMS

The world's largest exhibition focusing on Micro/MEMS & Nano Technologies


  Date: July 28 - 30 [Wed. to Fri.], 2010 10:00a.m. - 5:00p.m.
  Venue: Tokyo Big Sight, East Hall (Tokyo, Japan)

Visitor Registration

Online registration is now available! Visitor Registration

[You can also attend ROBOTECH with this registration.]
Scientists, researchers, buyers and decision-makers from all over the world will gather in this ideal place to investigate leading-edge technology and expand your business fields.

Micronano 2010 conferences

The various programs will be held during the exhibition.
Preregistration is not necessary.
They are open for all visitors seeking latest technology.




July 28 The 16th International Micromachine/Nanotech Symposium 
The Workshop on Industry - University Cooperation
MEMS Packaging Forum
July 29 Japanese-German Micro/Nano Business Forum 
The Workshop on Industry - University Cooperation
BEANS Project Seminar
July 30 TIA-NMEMS Symposium partⅠ
TIA-NMEMS Symposium partⅡ
July 30 ROBOTECH Seminar
July 28-30 ROBOTECH Theme zone
Exhibitor Presentations

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Main Exhibits

From R&D, fabrication, and quality control all the way to application, wide range of key devices and the latest technologies will be exhibited.




•MEMS process equipment •Nanoimprint technology •Nanomachining, microfabrication techniques •Measurement, inspection, & reliability testing machine •MEMS foundry service •Material •Modeling software •MEMS device •Biotechnology, medical application system •MEMS application system

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|  Visitor Info  |   Exhibitor Search   |  
|  The International Micromachine/Nanotech Symposium   |  
|  Japanese-German Micro/Nano Business Forum   |  
|  Hotel Reservation  |  
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